FIELD: measurement technology, measurement of characteristics of gas flows. SUBSTANCE: sensor has sensitive element coming in the form of substrate made of monocrystalline semiconductor material and having tubular shape with outer diameter 0.1-100.0 mcm and wall thickness 0.001-1.0 mcm. Sensitive layer of current conducting material is deposited on internal or external surface of substrate. EFFECT: enlarged frequency range of sensor. 1 dwg
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