PYROLYZED CARBON DEPOSITION METHOD AND APPARATUS Russian patent published in 2003 - IPC

FIELD: production of graphite materials in chemistry, atomic engineering and electronics. SUBSTANCE: method involves supplying mixture of hydrocarbon and inert gas to deposition zone and varying hydrocarbon concentration in time, with hydrocarbon consumption being increased in time corresponding to parabolic law at permanent inert gas flow rate in accordance with the following ratio: G = G₀+Aτ², where G₀ is initial hydrocarbon consumption rate, g/s; A is constant, g/cu.s, determined from preliminary experiment result at G = G₀; τ is process time, s. Apparatus has critical section for supplying of hydrocarbon and reducer for regulating pressure upstream of said critical section. Drive mechanism located in reducer is composed of parabolic cam and screw pair. Screw of screw pair is connected through eccentric to cam. Screw pair nut is connected to reducer handle through grip. Cam and screw are adapted for movement in perpendicular directions. EFFECT: increased efficiency in deposition of pyrolized carbon. 3 cl, 2 dwg