METHOD FOR PREPARING TETRAFLUOROMETHANE AND DEVICE FOR ITS REALIZATION Russian patent published in 2003 - IPC

Abstract RU 2211210 C1

FIELD: chemical technology. SUBSTANCE: invention relates to preparing tetrafluoromethane used as a solvent, foaming agent, in production of plastics, as dry etching agent of electronic circuits. Method is performed by interaction of carbon material with fluorinating gas at temperature 700-1200 C. Powder-like graphite with granulometric composition 0.8-2.5 mm is used as carbon material. Process is carried out in continuous regimen at constant control of temperature in the point on distance from center of reaction zone equal to 1.5-2.0 diameter of the reaction zone. Feeding fluorinating gas is ceased at temperature in this point 100-150 C. Then all mass of carbon material is subjected for stirring and process is restored at decrease of the carbon material temperature to 60-70 C. Process is carried out into reactor fitted with cooling jacket and nipple for the carbon material charge, connecting pipes for addition of fluorine and gas self- igniting from contact with fluorine, nipple for removal of technological gas and the dust trap. Reactor is fitted also with agitator of carbon material and the thermocouple pocket. Lower end of the thermocouple pocket is installed on the distance from center of reaction zone equal to 1.5-2.0 diameter of the reaction zone. Invention provides reducing consumption of reagents and liquid nitrogen, enhanced output, stabilized content of limited impurities in the end product. EFFECT: improved preparing method. 6 cl, 1 dwg, 1 tbl

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RU 2 211 210 C1

Authors

Varfolomeev L.I.

Koshman A.A.

Kytmanov V.A.

Makeev Ju.A.

Rabinovich R.L.

Strushljak A.I.

Shinkarkin N.L.

Jurochkin V.M.

Dates

2003-08-27Published

2002-04-22Filed