FACILITY TO ANALYZE PHYSICAL AND/OR CHEMICAL PROPERTIES OF SURFACE LAYER OF SOLID BODY Russian patent published in 2003 - IPC

FIELD: study of materials. SUBSTANCE: proposed facility incorporates unit forming monatomic and/or molecular and/or ion and/or electron and/or photon beams intended for action on surface layer of specimen. Output main line of forming unit coupled to registration system and carrying aid generating individual pulses of above-mentioned beams is brought into vacuum chamber, electric discharge initiator has electrode placed in vacuum chamber. Facility also includes timer, high-vacuum transmitter communicating with vacuum chamber, additional vessel for cooling agent installed in vacuum chamber and analyzing aid positioned between registration system and specimen and designed to record spectra of energy quanta emitted by surface layer of solid body. EFFECT: raised accuracy and informativity of measurement results. 4 cl, 18 dwg