FIELD: nanotechnologies.
SUBSTANCE: invention relates to methods for production of nanoparticles in a vacuum arc discharge. The method includes vacuumising a chamber with a cathode and an anode placed in it, initiation and maintenance of arc plasma microdischarges between the cathode and the anode in cathode spots when voltage of at least 10 V is applied, and the discharge current of at least 1 A, nanoparticles are synthesised and deposited onto a collector or a carrier. At the same time pressure in the chamber is maintained of not more than 10 Pa. Nanoparticles are synthesised by evaporation of cathode material, natural expansion of steam from cathode spots into vacuum and/or low-density cold plasma of a spark gap and its cooling and nucleation in a zone or zones of primary synthesis. Besides, the synthesis may also be carried out by transportation of an ionised part of steam into a zone or zones of secondary synthesis, which is not synthesised during evaporation and natural expansion into vacuum using electromagnetic fields, and its treatment in these zones by low-temperature plasma and/or a chemical gaseous agent and/or a chemical gaseous agent and/or an ion and/or electronic and/or molecular bundle.
EFFECT: method simplification, its increased efficiency, reduced dispersion of sizes of produced nanoparticles.
17 cl, 3 dwg
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Authors
Dates
2012-07-10—Published
2010-08-27—Filed