NON-CONTACT METHOD FOR MEASURING LINEAR DIMENSIONS, WEAR AND DEVICE FOR REALIZATION OF SAID METHOD Russian patent published in 2005 - IPC

FIELD: microscopy.

SUBSTANCE: measurements are performed by focusing microscope on objects lying in different planes along microscope axis. In direction of perpendicular line to table surface position of optical system is determined on basis of readings of separate counting device with rigidly set counting start point. For that rigidly and unambiguously connected in noted direction to table and optical system measuring bases are used. By moving a sample relatively to optical system in table plane focusing is serially performed as well as reading indications in all set points of first researched surface, after that sample is removed. Without changing of adjustments of counting device, focusing is performed and indications are read in different points of next surface of other sample. Accordingly, dimensions of sample or its wear or difference of dimensions of samples are determined as difference of indications of counting device in appropriate surface points.

EFFECT: higher efficiency.

2 cl, 3 dwg