INSTALLATION FOR MEASUREMENT OF MICRORELIEF USING PHASE STEP METHOD Russian patent published in 2019 - IPC G01B11/30 G01B9/04 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of opto-electronic measuring devices and is intended to obtain information about the two-dimensional distribution of the heights of the surface microrelief, which are used in optical instrumentation, microelectronics and materials science. Installation for measuring the surface microrelief using the phase step method contains a vibration-proof support, an object table, an illuminator with a collimator, a digital video camera, and an interference microscope made according to the Linnik scheme. Device is equipped with interchangeable micro lenses. Object table is made mobile and is located under the micro-lens of the object channel. Lighter is made in the form of a point-coherent low-coherence LED. Reference mirror of the reference channel is made on the basis of a monatomic silicon layer. Reference mirror is rigidly connected to the micro-lens of the reference channel in a single unit, which is moved by means of a piezo-drive with feedback. Setting up the microscope is made on the base plane.

EFFECT: possibility of obtaining the profile height and profile roughness in the subnanometer range with greater accuracy, as well as expanding the measurement range and increasing the stability of readings during long-term measurements.

1 cl, 4 dwg