INTERFERENCE MICROSCOPE Russian patent published in 2014 - IPC G02B21/00 

FIELD: physics.

SUBSTANCE: interference microscope comprises a light field microscope for forming an enlarged image of an object in a back focal plane, a 4f optical system of two Fourier lenses, the front focal plane of which coincides with the back focal plane of the light field microscope. An output image recorder is placed in the back focal plane of the 4f optical system. A beam splitter is placed inside the 4f optical system before the common focal plane, said splitter forming two spaced-apart light beams which converge in the common focal plane of the 4f optical system, where two flat mirrors are placed perpendicular to the optical axis of each of the beams. Said mirrors reflect incident radiation in the opposite direction, and a pinhole, which transmits only non-scattered radiation and forms the reference beam, is placed in front of one of said mirrors. The beam splitter forms two parallel spaced-apart light beams with zero path difference, and reflecting surfaces of the flat mirrors lie in the same plane.

EFFECT: high measurement accuracy.

6 cl, 5 dwg