FIELD: plasma testing.
SUBSTANCE: flows of tested particles which leave different areas of plasma are formed by means of subsequent scanning of total area of plasma. For the purpose the particles are passed through slits of diaphragms. One diaphragm is rotated in such a way that area of overlapping of slits moves relatively plasma. Moments of time of measurement of re-charge neutrals spectra are fixed which moments correspond to different positions of slits. Time of registration of any spectrum is compared with area of plasma to be analyzed. Device has two diaphragms disposed on the way of analyzed particles directly in opposition to each other for forming bundle of particles. One diaphragm is mounted for rotation to form re-charge neutrals flows.
EFFECT: improved precision of measurement.
5 cl, 4 dwg
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