FIELD: physics.
SUBSTANCE: invention relates to a method and an apparatus for analyzing ions based on energies, masses and charges using electric and magnetic fields and can be used to determine elemental composition, for example, plasma of working medium and in studying surfaces of solid bodies. Energy, mass and charge analysis is performed in tandem of energy analyzer with retarding potential and linear Wien filter, and ions are recorded on detector located at tandem output of two analyzers. Analyzer for energies, masses and charges enables analysis of ion beams both by energy and mass and by charge, when analyzing by masses and charges – to work with non-monoenergetic streams of ions, having a large initial angular spread, which provides a large aperture and aperture ratio of the analyzer.
EFFECT: expansion of functional capabilities of existing energy-mass analyzers.
2 cl, 7 dwg
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