FIELD: micro-system technique.
SUBSTANCE: microdrive includes hollow cylinder with working fluid and piston with rod. Helix for heating working fluid is arranged in hollow cylinder. On outer surface of hollow cylinder there is system for cooling working fluid. Said system is in the form of coating of semiconductor thermo-electric modules. Working fluid of micro-drive is in the form of drop of easy-to-evaporate liquid such as ether or alcohol.
EFFECT: simplified operation and design, improved quick response of micro-drive.
3 dwg
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TWO-WAY PIEZOELECTRO-MECHANIC MICRO-DRIVE UNIT | 2004 |
|
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Authors
Dates
2005-12-27—Published
2004-06-01—Filed