FIELD: lithography technologies.
SUBSTANCE: method includes generation of computer model for forming layered image of three-dimensional product and supports for it, layer-wise forming of product of liquid photo-polymerizing composition on flat surface of platform, discontinuously immersed into tank with liquid photo-polymerizing composition, by scanning by means of laser beam with utilization of portal-type ray displacement system. Photo-polymerizing composition is thermostatted at a temperature, maintaining it in liquid state, and each processed layer of photo-polymerizing composition on the surface of platform is evened out prior to scanning. Plant has hard-body laser with diode powering, emitting in green spectrum range, namely, at wave length 532 nm, optical means for scanning laser beam, containing portal-type system for displacement of ray, tank with photo-polymerizing composition, platform with device for its discontinuous vertical movement, system for evening out surface of processed photo-polymerizing composition layer, acoustic-optic modulator and computer control system. As photo-polymerizing composition, mixture of highly viscous metacrylated biglycidylphenylpropane and low-viscous acryl poly-functional monomer is utilized, including initiation system, capable of polymerization at high speed under effect from visible light.
EFFECT: increased operation resource of plant and increased process area.
2 cl, 3 dwg
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Authors
Dates
2006-02-10—Published
2004-02-17—Filed