METHOD FOR DETERMINING IMPERMEABILITY LEVEL OF ISOLATED VOLUME BELONGING TO SYSTEM FOR FEEDING WORKING BODY WITH PLASMA SOURCE, PRIMARILY UNDER CONDITIONS OF VACUUM Russian patent published in 2006 - IPC G01M3/00 

FIELD: engineering of testing equipment.

SUBSTANCE: method includes measuring pressure and temperature in isolated volume at beginning time moment, calibrated flow of gas phase of working body during control time span with following measuring of pressure and temperature in isolated volume. On basis of measured pressure and temperature control speed of pressure measuring during control time is determined, in fixed time spans pressure and temperature are measured in isolated volume during cease of working body influx. At each fixed time span current speed of pressure change is determined. As calibrated flow of gas phase of working body, flowing of ionized gas from isolated volume through plasma source is taken. As control time, time of operation of aforementioned plasma source is taken. Measuring of parameters is performed, characterizing operation of plasma source, on basis of which control flow of working body from isolated volume is determined, and on basis of it control pressure change speed is determined. Determining of impermeability level is performed by comparing current pressure measuring speed with control pressure measuring speed, received on basis of parameters, characterizing operation of plasma source.

EFFECT: improved precision of tests.

1 dwg