FIELD: optical instrument engineering, applicable for measurement of reflection factors close to unity of various mirrors.
SUBSTANCE: the reflectometer of multiple reflection has successively installed radiation source forming a parallel beam, modulator with a drive, diaphragm of size "dx1", two plane mirrors, photodetector device, amplifier and a recorder. The reflectometer is also provided with two pentaprisms forming an optical rhomb one of which is fixed and installed in the direction of propagation of the radiation beam past the diaphragm, a carriage installed on which is the second pentaprism, guide, drive of the carriage reciprocating motion, in the extreme lower position of the carriage the outlet face of the pentaprism installed on it faces the reflecting surface of the first mirror, and in the extreme upper position the inlet face of the pentaprism is positioned at distance "h" above the reflecting surface of the second plane mirror, synchronization unit whose one of the inputs is connected to the output of the carriage motion drive, and the second one - to the output of the modulator drive, as well as an objective lens, whose diameter of the entrance pupil is .
EFFECT: enhanced precision of measurement of the reflection factor.
1 dwg
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Authors
Dates
2006-08-10—Published
2005-02-14—Filed