REFLECTOMETER ON THE BASIS OF MULTI-PASS OPTICAL TRAIN Russian patent published in 2006 - IPC G01N21/55 

FIELD: high-precision measurement of the reflection factor of mirrors and the transmission factor of transparent specimens.

SUBSTANCE: the reflectometer has a source of monochromatic radiation, projective optical system, two objective lenses, collecting lens, receiving optical system, rotary carriage, base for installation of the mirror under check, receiving-registering unit and two plane mirrors, one of which is positioned to the left of the first objective lens, and the normal to its reflecting surface is parallel with the optical axis of the multi-pass optical train, and the other plane mirror is positioned to the right of the second objective lens, and the normal to its reflecting surface constitutes a certain angle with the optical axis of the multi-pass optical train. The objective lenses and the collecting lens are made of lenses, the collecting lens forming a confocal centered optical system. The reflectometer is additionally provided with a carriage that carries the receiving optical system and a drive of rectilinear translational motion of the carriage, as well as with a plane-parallel beam-splitting plate, objective lens and a photodetector device installed in the direction of propagation of radiation just past the source of radiation. The reflectometer is also provided with a cell for installation of the transparent specimen under check, positioned between the second objective lens and the plane mirror.

EFFECT: enhanced accuracy of measurement of the reflection factor of the mirrors due to the increase of the number of passages, and simplified adjustment and tuning of the optical system, expanded functional potentialities associated with provision of measurement with a high precision of the coefficient of passage of transparent specimens.

3 cl, 1 dwg