FIELD: high-voltage engineering, in particular, the sphere of electric insulation in particular, the sphere of electric insulation in vacuum, applicable in the electronic industry for enhancement of the quality of cathodes and the electric strength of electronic devices and constructions.
SUBSTANCE: the method for enhancement of the quality of the cathode surface of a vacuum gas consists in action of single nanosecond pulses at amplitudes providing for the break-down lag time equal to the duration of pulse. According to the preset cathode material and pulse duration, critical microstress Ecr of the electric field duration, critical microstress Ecr of the electric field is determined, the prebreak-down currents are measured, and field gain β on heterogeneities is computed, amplitude of the action pulse is computed, the action pulse of computed amplitude U is applied to the gap, then all the subsequent operations are repeated until the required value of gain β is attained, in case of an insufficient value of gain β the pulse duration is decreased and the all mentioned operations are repeated.
EFFECT: enhanced efficiency of the method due to monitoring of the state of the cathode surface during processing and optimization of the amplitude of each pulse.
2 dwg
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Authors
Dates
2007-02-20—Published
2005-10-19—Filed