FIELD: electrical engineering; production of electronic devices including capacitors.
SUBSTANCE: proposed method includes firing tantalum hardware, assembling glass pellets and tantalum hardware to produce glass-tantalum insulator, vitrifying, and forming oxide insulating layer on tantalum of glass-tantalum insulator; firing is conducted in vacuum with inert gas admitted in vitrification phase; in the course of temperature rise insulator is exposed to temperature of 600°C in vacuum followed by admission of inert gas to working zone and then to temperature of 1100 - 1185 °C, whereupon it is cooled down to 550°C, whereupon inert gas is evacuated.
EFFECT: eliminated glass cracking, improved glass junction quality in glass-tantalum insulator, enhanced reliability of capacitor sealing.
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Authors
Dates
2007-05-27—Published
2005-12-09—Filed