FIELD: electronic industry; mechanical engineering; other industries; production of the directors for feeding the belts into the vacuum installations used for the coatings rolling on the belts.
SUBSTANCE: the invention is pertaining to the directors for feeding the belts into the vacuum installations used for the coatings rolling on the belts. The directors for feeding the belts into the vacuum installations used for the coatings rolling on the belts contains at least one guide roll, the special position of the axis of which can be regulated. The guide roll is mounted between two bearings of rotation, at least, one of which is mounted with the capability of relocation in relation to other across the axis. It happens predominantly due to the fact, that the being transferred bearing of rotation contains the fixed on the wall of the chamber guide, on which the slide is moving along with the transferred bearing of rotation, and the drive of relocation with the remote-control. For the module installations having several chambers the invention ensures compensation of the lapses of the coaxiality of the chambers with respect to each other and-or the complete elimination of the transferable roll devices for deposition of the coatings, relocation of which would have required additional adjustment of the sources of machining and coating and the separating clearances on the periphery of coating rolls.
EFFECT: For the module installations having several chambers the invention ensures compensation of the lapses of the coaxiality of the chambers with respect to each other, the complete elimination of the transferable roll devices for deposition of the coatings, relocation of which would have required additional adjustment of the sources of machining and coating and the separating clearances on the periphery of coating rolls.
18 cl, 3 dwg
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Authors
Dates
2007-08-20—Published
2005-01-27—Filed