METHOD OF INTERFERENCE MEASURING OF OPTICAL ITEMS' SURFACE SHAPES Russian patent published in 2007 - IPC G01B9/02 G01B11/24 

Abstract RU 2305254 C1

FIELD: interference measuring technique.

SUBSTANCE: after interferometer is preliminary adjusted, intensity of maximum Imax and of minimum Imin of interference patterns is measured for any order of interference. Then visibility Vn of interference pattern is calculated for any n-th passage from formula of V=(Imax-Imin)/(Imax-Imin). Interference measurements themselves are conducted at that number of passages n, at which value nVn reaches maximal meaning. Probing radiation is multiply re-reflected between reference and tested surfaces.

EFFECT: widened functional abilities; improved precision of measurement.

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RU 2 305 254 C1

Authors

Noskov Mikhail Fedorovich

Dates

2007-08-27Published

2006-02-01Filed