METHOD FOR FORMING NANO-(MICRO-)SYSTEMS FROM CARBON NANOTUBES Russian patent published in 2007 - IPC B82B3/00 

FIELD: methods for forming nanomicrosystems, containing carbon nanotubes.

SUBSTANCE: the method for forming nano-(micro-)systems from carbon nanotubes, positioned in accordance to a given pattern, includes applying a multi-layer cover, containing a catalytic layer, onto a substrate. Carbon layer of nano-dimension thickness is applied to catalytic layer, after than given pattern is applied to catalytic layer by placing a sample into working chamber with oxidizing substance, stabilizing its composition with one of known methods - placement of a probe with nano-dimension sharp tip above the sample with creation of tunnel-transparent probe-sample system, and creating electric influence on the system of constant or impulse mode, by setting a difference of potentials on it or letting a given current through it, while the process of local oxidizing of carbon layer is controlled up to opening of catalytic layer, respectively, by current and by current derivative - for potential mode, and by voltage and voltage derivative - for current mode, after that sample is placed in a growth chamber, heated up to temperature ˜ 350...600°C in presence of gas-reagents and high frequency or ultra-high frequency radiation.

EFFECT: during forming of nanomicrosystems it possible to position single carbon nanotubes according to a given pattern.