SET OF EXTREMELY NARROW-BAND TWO-CHAMBER GAS-DISCHARGE LASERS CHARACTERIZED IN HIGH PULSE REPETITION FREQUENCY Russian patent published in 2007 - IPC H01S3/02 H01S3/09 H01S3/97 

Abstract RU 2306649 C2

FIELD: electric-discharge lasers including narrow-band gas-discharge ones characterized in high pulse repetition frequency.

SUBSTANCE: each of proposed lasers designed for producing pulses at repetition frequency of 4000 Hz or higher at pulse energy about 5 to 10 mJ or higher affording radiation power output of 20 to 40 W or higher has two separate discharge chambers of which one is part of master oscillator generating narrow-band prime beam which is amplified in second discharge chamber. Working chambers can be controlled separately. Each working chamber has one tangential-flow fan producing gas flow sufficient for operation at pulse repetition frequency of 4000 Hz. Master oscillator is provided with radiation-line narrowing module incorporating fast-response adjusting mirror.

EFFECT: enhanced quality of laser pulse radiation beams and power output.

78 cl, 80 dwg

Similar patents RU2306649C2

Title Year Author Number
LINE-SELECTABLE DOUBLE-CHAMBER F LASER SYSTEM 2002
  • Noules Dehvid S.
  • Braun Dehniel Dzh. V.
  • Sehndstrom Richard L.
  • Rilov German E.
  • Onkel'S Ehkkekhard D.
  • Bezosel' Ehrve A.
  • Majers Dehvid V.
  • Ershov Aleksandr I.
  • Partlo Vill'Jam N.
  • Fomenkov Igor' V.
  • Uzhazdovski Richard K.
  • Ness Richard M.
  • Smit Skott T.
  • Khalberd Vill'Jam Dzh.
RU2298271C2
HIGH-POWER GAS-DISCHARGE LASERS WITH EMISSION-LINE HELIUM-BLAST NARROWING MODULE 2000
  • Partlo Vill'Jam N.
  • Sehndstrom Richard L.
  • Tsibul'Ski Rehjmond F.
  • Fomenkov Igor' V.
  • Ershov Aleksandr I.
RU2250544C2
HIGH-RELIABILITY NARROW-BAND INDUSTRIAL EXCIMER LASER OF MODULAR DESIGN BUILT AROUND KRYPTON FLUORIDE 1999
  • Noules Dehvid S.
  • Azzola Dzhejms Kh.
  • Besoehl' Kherv A.
  • Das Palash P.
  • Ershov Aleksandr I.
  • Jukhash Tibor
  • Ness Richard M.
  • Ozarski Robert G.
  • Partlo Vill'Jam N.
  • Rotvejl Dehniel A.
  • Sehndstrom Richard L.
  • Uzhazdovski Richard K.
  • Vatson Tom A.
  • Fomenkov Igor' V.
RU2197045C2
LASER LITHOGRAPHIC LIGHT SOURCE WITH BEAM TRANSMISSION 2002
  • Klene Brajan S.
  • Das Palash P.
  • Grouv Stiven L.
  • Ershov Aleksandr I.
  • Smit Skott T.
  • Pan Ksiaodziang Dzh.
  • Sehndstrom Richard L.
RU2340057C2
RADIATION SOURCE BUILT AROUND PLASMA FOCUS WITH IMPROVED SWITCHING-MODE SUPPLY SYSTEM 2000
  • Partlo Vill'Jam N.
  • Fomenkov Igor' V.
  • Oliver I. Rodzher
  • Ness Richard M.
  • Birks D.L.
RU2253194C2
CONTROL WITH SERVO FEEDBACK BASED ON ALLOCATED SCANNING TRACKING BEAM IN DISPLAY SYSTEMS WITH SCANNING BEAMS AND LIGHT-EMITTING SCREENS 2008
  • Khadzhar Rodzher A.
  • Batler Kristofer Dzh.
  • Kent Dehvid L.
  • Kaluzhnyj Mikhail
RU2425427C1
USE OF MOLECULE OF CARBON NANOBUD AND DEVICES COMPRISING SUCH MOLECULES 2009
  • Braun Dehvid P.
  • Ehjtchison Bredli Dzh.
RU2497237C2
GAS DISCHARGE LASER, LASER SYSTEM AND METHOD OF RADIATION GENERATION 2012
  • Khristoforov Oleg Borisovich
RU2507654C1
GAS-DISCHARGE LASER, LASER SYSTEM AND METHOD OF GENERATING RADIATION 2012
  • Khristoforov Oleg Borisovich
RU2514159C2
EXCIMER LASER SYSTEM AND METHOD OF GENERATING RADIATION 2012
  • Khristoforov Oleg Borisovich
RU2519869C2

RU 2 306 649 C2

Authors

Noules Dehvid S.

Braun Dehniel Dzh. V.

Bezosel' Ehrve A.

Majers Dehvid V.

Ershov Aleksandr I.

Partlo Vill'Jam N.

Sehndstrom Richard L.

Das Palash P.

Anderson Stjuart L.

Fomenkov Igor' V.

Uzhazdovski Richard K.

Onkel'S Ehkkekhard D.

Ness Richard M.

Smit Skott T.

Khalberd Vill'Jam Dzh.

Oikles Dzheffri

Dates

2007-09-20Published

2002-08-28Filed