METHOD FOR MEASURING GEOMETRICAL PARAMETERS OF SMALL-DIMENSION LOW-STABLE OBJECTS AND DEVICE TO THIS EFFECT Russian patent published in 2008 - IPC G01B13/06 G01B13/12 

FIELD: physics, survey.

SUBSTANCE: gas is injected, through inlet nozzles, to independent measuring chambers and further, through metering nozzles, to gap between end surfaces of metering nozzles and surface of measured object. Pressure changes are registered in both independent measuring channels with sensitive elements. By means of electronic data processing module (DPM), measuring gap corresponding to pressure level is detected. Combination of measuring gaps of measuring channels is used to calculate total gap and evaluate real dimensional characteristics of an object. Measurement is carried out at low working pressures providing subsonic laminar nature of gas flow. Real geometrical parameters data are received using individual manometric characteristics of each independent measuring channel predetermined experimentally and DPM-prestored. Prior to measurement range thereof is fixed by moving a metering nozzle of one of the chambers. Metering nozzles are made demountable, nozzle body being cone adjacent to case. Invention allows for high accurate control of linear dimensions and shaping inaccuracies of small-dimension objects within wide range of measurement.

EFFECT: is shapes high-accurate control of linear dimensions and inaccuracies of small-dimension objects within wide range of measurement.

2 cl, 7 dwg