FIELD: chemistry.
SUBSTANCE: process of hydrogen reduction of trichlorosilane is carried out on heated silicon rods of bases 5. Supply of trichlorosilane to the reactor is then blocked and a filtered mixture of tetrachlorosilane and polysilanechloride are supplied to the inlet nozzle 3 in the cover of reactor 1. A specific flow rate of hydrogen is set. In the reactor the decomposition process of polysilanechloride with simultaneous hydrogenation of the products of decomposition and tetrachlorosilane takes place. As a result of this trichlorosilane is formed, restored on the rod-bases 5 with hydrogen to silicon.
EFFECT: possibility of apart from carrying out the main process to additionally process the waste of high-boiling chlorosilane and silicon tetrachloride.
1 dwg
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