FIELD: chemistry.
SUBSTANCE: method of processing stillage residue containing polysilanechloride involves its conversion into a gaseous state in the reactor with raised silicon rods, which are heated to the temperature 1100-1150°C. Introduction of the liquid mixture of silicon tetrachloride and polysilanechloride is carried out in the ratio 1:(0.1-0.2). Hydrogen is supplied for counter-flow in the reactor in the ratio 1:(6-10).
EFFECT: capability of converting up to 80% of polysilanechloride to trichlorosilane.
1 dwg
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Authors
Dates
2008-12-20—Published
2007-04-09—Filed