FIELD: motors and pumps.
SUBSTANCE: plasma-chemical plant includes metal vacuum chamber 1 with reactor pot made of dielectric material connected to the pump assembly. Reactor pot is implemented with cylindrical cup 4 and dielectric lid 5. There is an opening in the lower part of reactor pot to supply plasma-producing medium and create vacuum in the pot. Plasma-producing medium is supplied though the vertical dielectric tube 6 provided with openings along the whole tube length. Tyne tube ends up with flow distributor 7 also provided with openings. Electrodes 8 are represented with perforated aluminum plates arranged along cylindrical cup generatrix.
EFFECT: effective processing of large plate specimen surfaces being in static conditions at relatively high fill factor of reactor pot volume.
2 cl, 2 dwg, 5 tbl
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