CORPUSCULAR-OPTICAL SYSTEM FOR GENERATING IMAGES (VERSIONS) Russian patent published in 2009 - IPC H01J37/153 

FIELD: information technology.

SUBSTANCE: proposed system contains a vacuum system, object table with a test sample, light source, objective and series-arranged dispersion type magnetic deflector (MD), aberration corrector (AC), based on axially symmetric aberration electrostatic mirror, carrier lens unit and projection unit. A compensator of angular energy dispersion (CAED), containing an axially symmetric unit of guide electronic lenses (UGL), is installed after the magnetic deflector. In the first version in the compensator of angular energy dispersion after the unit of guide electronic lenses there is an electrostatic mirror, adjusted in the mode of aberration-free image transfer to the centre of the magnetic deflector with optical magnification coefficient (OMC) equal to 1, with formation of negative feedback on angular energy dispersion. In the second version a second magnetic deflector is installed after the unit of guide electronic lenses, identical to the first. The unit of guide electronic lenses provides for image transfer to the centre of the second magnetic deflector with optical magnification coefficient equal to 1. In the third version a second magnetic deflector is installed after the unit of guide electronic lenses, not identical to the first, and the unit of guide electronic lenses provides for image transfer to the centre of the magnetic deflector with value of optical magnification coefficient equal to the ratio of sines of angle of deflection of optical axes of the first and second magnetic deflectors.

EFFECT: increased resolution due to correction of spherochromatic aberration and elimination of causes of quadratic chromatic aberration.

7 cl, 5 dwg, 1 tbl