IMAGING ENERGY FILTER FOR ELECTRICALLY CHARGED PARTICLES AND SPECTROSCOPE HAVING SAME Russian patent published in 2014 - IPC H01J37/05 H01J49/44 

FIELD: physics.

SUBSTANCE: invention relates to an imaging energy filter for electrically charged particles with a toroidal energy analyser (30), preferably with a hemispherical analyser, with an entrance plane (4) and an exit plane (1). A mirror element (2) for electrically charged particles is provided and is arranged such that charged particles leaving the toroidal energy analyser through the exit plane are reflected back into the toroidal energy analyser by the mirror element such that the charged particles pass through the toroidal energy analyser one more time in the opposite direction.

EFFECT: higher position and angle resolution and enabling use of a larger allowable angle.

15 cl, 4 dwg