DEVICE FOR ANALYSING PERFECTION OF STRUCTURE OF CRYSTALLINE LAYERS Russian patent published in 2009 - IPC G01N23/22 

FIELD: physics.

SUBSTANCE: device for analysing perfection of the structure of crystalline layers has series-arranged X-ray source, apparatus for monochromatisation and collimation of X-rays, the analysed object with turning apparatus, first energy analyser, first electron detector and X-ray detector. The analysed object, first energy analyser and first electron detector are kinematically linked to each other and are placed in a vacuum chamber. The axis of the first analyser is aligned with the surface of the analysed object and the focal point of the energy analyser is aligned with the X-ray diffraction reflection region. The device also has a second electron detector, second energy analyser, placed in a vacuum chamber in line with the first energy analyser and kinematically linked to the analysed object and the second electron detector. The energy analysers used are spherical mirror type analysers, whose focal points are aligned. The electron detectors are placed on the surface of inner spherical electrodes of the first and second energy analysers at points which are opposite the focal point.

EFFECT: more accurate and faster analysis.

2 dwg