DEVICE FOR ANALYSING PERFECTION OF STRUCTURE OF MONOCRYSTALLINE LAYERS Russian patent published in 2009 - IPC G01N23/22 

FIELD: physics.

SUBSTANCE: device for analysing perfection of the structure of monocrystalline layers has series-arranged X-ray source, apparatus for monochromatisation of X-rays and the analysed crystal with turning apparatus, electron energy analyser and electron detector. The analysed crystal, energy analyser and detector are placed in a vacuum chamber. The energy analyser used is a spherical mirror type analyser, placed between the analysed crystal and the apparatus for monochromatisation of X-rays and consists of inner and outer concentric hemispherical electrodes. The analysed crystal is placed at the focal point of the analyser, on which a slit is made in the X-ray propagation path. The electron detector is placed between the inner hemispherical electrode and the analysed crystal.

EFFECT: wider range of analysis due to wider range of diffraction angles of the analysed crystal.

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