INSTALLATION FOR TOPO-TOMOGRAPHIC STUDIES OF SAMPLES Russian patent published in 2018 - IPC G01N23/20 

FIELD: technological processes.

SUBSTANCE: using to study the perfection of single-crystal layers. Summary of invention is thatinstallation for studying samples contains an X-ray source and a block with a monochromator crystal installed along the X-ray beam, a goniometer with a sample mounted on it, a slit diaphragm and a detector, in addition, a tubular collimator with a length of 80 to 100 cm is additionally inserted between the monochromator crystal and the slit diaphragm, the internal cavity of which is evacuated to a pressure not lower than 100 Pa by means of a vacuum pump, goniometric head is made with the possibility of changing the spatial position in three planes by means of stepping motors, the slit diaphragm is made with the possibility of changing the size of the radiation beam horizontally and vertically, the detector unit is movable and equipped with a cooling system.

EFFECT: ensuring the possibility of registering a three-dimensional map of the location of defects inside the crystal.

6 cl, 6 dwg