METHOD FOR REDUCING ERROR IN MEASURING VACUUM WITH MANOMETRIC RESISTANCE TRANSDUCER Russian patent published in 2023 - IPC G01L21/12 

FIELD: measurement instrumentation.

SUBSTANCE: method for measuring vacuum that can be used to create vacuum gauges with measurement limits from 10^-5 to 760 torr based on manometric resistance transducers. The aim of the invention is to reduce the measurement error due to changes in ambient temperature. The essence of the proposed technical solution is that a measuring pressure gauge resistance transducer is electrically connected in series to the volume in which gas pressure is measured, sealed off and pumped out to a high vacuum, the same resistance pressure transducer, and the same resistance pressure transducer sealed and filled to atmospheric pressure. A constant voltage is maintained on the measuring transducer by regulating the voltage at the ends of an electrical circuit consisting of three series-connected pressure gauge resistance transducers. A fraction is used as an information parameter, in the numerator of which is the ratio of the voltage difference on the pressure gauge transducer with a pressure below 10^-5 torr and the voltage on the measuring transducer to their sum, and in the denominator the sum of two terms, one of which is the ratio of the voltage difference on the measuring transducer and voltage on the transducer with atmospheric pressure to their sum, and the second is the ratio of the voltage difference on the gauge transducer with a pressure below 10^-5 torr and the measuring transducer to their sum. The information parameter f(P), which determines the pressure P, is calculated using the following relationship

,

where U_meas is the voltage at the measuring transducer connected to the volume in which the gas pressure is measured; U_vac - voltage on the manometric resistance transducer, pumped out to high vacuum and soldered; U_atm - voltage on the manometric resistance transducer, filled to atmospheric pressure and sealed off. The total voltage U = U_meas + U_vac +U_atm is regulated so that the voltage U_meas remains unchanged.

EFFECT: reduction of the error in measuring gas pressure.

1 cl, 5 dwg