METHOD OF OBTAINING SPATIAL DISTRIBUTION OF CHEMICAL ELEMENTS ON SURFACE OF SPECIMEN Russian patent published in 2010 - IPC G01N23/223 

FIELD: chemistry.

SUBSTANCE: surface of a specimen is exposed to ionising radiation while picking up the X-ray fluorescence radiation formed. The fluorescence radiation of the specimen is analysed using an image obtained using a semiconductor recording device based on a mathematical data processing procedure. The specimen is exposed to a wide beam of ionising radiation with energy sufficient for exciting characteristic X-ray radiation of elements making up the specimen. An image is formed through a pinhole camera and the recording device used is an X-ray sensitive CCD camera which operates in separate quanta detection mode. Information is accumulated in frame mode with short frame duration. Programmed mathematical processing is carried out in each frame, picking out pixels in each frame which correspond to the characteristic X-ray line of the chemical element of interest, after which as a result of successive summation of a certain number of frames, the unknown distribution of the chemical element on the surface of the specimen is found.

EFFECT: simple procedure of finding distribution of chemical elements on the surface of a specimen with resolution power comparable to that when using more complex procedures for finding distribution of chemical elements on the surface of a specimen.

3 cl, 2 dwg