CONTINUOUS X-RAY RADIATION DETECTOR FOR SCANNING ELECTRON MICROSCOPE Russian patent published in 2024 - IPC G01T1/10 

FIELD: registration of continuous X-ray radiation.

SUBSTANCE: continuous X-ray radiation detector for a scanning electron microscope consists of a thin-film X-ray scintillation detector based on the K-71 phosphor with an operating wavelength of 450±5 nm and radiation brightness ≤2.5 cd/W with protection against electrons hitting it, consisting of a combination of a thin layer of beryllium and mica, fixed at the end of the light guide, providing optical coupling of the detector with a photomultiplier tube.

EFFECT: expanding the operational capabilities of a scanning electron microscope, obtaining additional information about the internal structure of the object of study.

1 cl, 1 dwg