FIELD: chemistry.
SUBSTANCE: abrasive powder material is in form of aluminium oxide particles and contains transition aluminium oxide and not less than 5.0 wt % but not more than 40 wt % amorphous phase. The aluminium oxide particles have density of not less than 3.20 g/cm3. The invention also pertains to an abrasive suspension containing water as a solvent and said abrasive powder material in amount ranging from 3.0 wt % to not more than 30 wt %. The invention also relates to a method of preparing said abrasive material, involving: burning aluminium-containing material by heating said material to temperature sufficient for turning said aluminium-containing material into initial particles mainly containing transition aluminium oxide; and grinding the obtained initial particles to obtain aluminium oxide particles containing transition aluminium oxide and not less than 5.0 wt % but not more than 40 wt % amorphous phase. Said aluminium oxide particles have density less than 3.20 g/cm3. The method of polishing a conducting metal surface of a workpiece involves putting the abrasive suspension between the workpiece and a slab and moving the slab and workpiece relative each other.
EFFECT: change in density of abrasive material, improved selectivity of the suspension which contains the abrasive material.
24 cl, 6 dwg, 3 tbl, 2 ex
Authors
Dates
2010-10-20—Published
2006-10-13—Filed