FIELD: physics, optics.
SUBSTANCE: invention relates to a thermally stable multilayer mirror for the extreme (short wave) ultraviolet (UV) spectral range and can be used as a heated collector mirror of a source of radiation in the extreme UV range. The multilayer mirror for reflecting radiation in the extreme UV range has multiple alternating molybdenum and silicon layers. On multiple boundary planes between the molybdenum and silicon layers there are barrier layers which contain silicon nitride or silicon boride, respectively.
EFFECT: high thermal stability, particularly stability at temperatures higher than 300°C, with high reflecting power of the multilayer mirror.
16 cl, 7 dwg
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