MIRROR-MONOCHROMATOR FOR HARD ULTRA-VIOLET RADIATION Russian patent published in 2006 - IPC G02B5/08 G21K1/06 

FIELD: ultra-violet radiation.

SUBSTANCE: the mirror-monochromator has a multi-layer structure positioned on a supporting structure and including a periodic sequence of two separate layers (A,B) of various materials forming a layer-separator and a layer-absorber with a period having thickness d, Bragg reflection of the second or higher order is used. Mentioned thickness d has a deviation from the nominal value not exceeding 3%. The following relation is satisfied: (n_Ad_A + n_Bd_B)cos(Θ) = m λ/2, where d_A and d_B - the thicknesses of the respective layers; n_A and n_B - the actual parts of the complex indices of reflection of materials of layers A and B; m - the integral number equal to the order of Bragg reflection, which is higher than or equal to 2, λ - the wave-length of incident radiation and Θ - the angle of incidence of incident radiation. For relative layer thickness Г=d_A/d relation Г<0.8/m is satisfied.

EFFECT: provided production of a multi-layer mirror, which in the range hard ultra-violet radiation has a small width of the reflection curve by the level of a half of the maximum at a high reflection factor in a wide range of the angles of incidence.

6 cl, 1 dwg