METHOD TO PRODUCE NANOPARTICLES AND DEVICE FOR ITS REALISATION Russian patent published in 2011 - IPC B82B3/00 B22F9/14 C23C4/00 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to methods and devices to produce particles of nanometre size, to create sensor, electronic and optoelectronic instruments and highly selective solid-state catalysts. Melted material is dispersed. Produced liquid microdrops of this material are sent into flow of electrons to recharge microdrops to condition, when their cascade division starts to produce nanoparticles applied onto substrate. At the same time parametres of electrons flow and time of liquid drops stay in it comply with certain ratios. Proposed device comprises the following components arranged in vacuum chamber and installed coaxially - unit of microdrops flow formation with cathode and anide, unit of microdrops recharging and unit of nanoparticles deposition with disk cathode with central hole, anode and substrate installed on anode. At the same time unit of microdrops flow formation is installed with axial gap relative to unit of microdops recharging, around which a circular control electrode is installed, connected to controlled source of voltage. Additionally unit of microdrops flow formation comprises dielectric disk with central hole, in circular slot of which there is a circular cathode installed, and anode is arranged in the form of metal needle, being the first anode. And unit of microdrops recharging comprises dielectric vessel in the form of round hollow cylinder with central end holes, where the first round cylindrical cathode and the first round cylindrical metal net, being the second anode, are installed, between which the first emitter of electrons is installed.

EFFECT: invention provides for formation of nanostructure from nanoparticles of smaller size and with narrower dispersion.

15 cl, 3 dwg