METHOD FOR FABRICATION OF CATHODE-MESH ASSEMBLY WITH CARBON AUTO EMITTERS Russian patent published in 2019 - IPC H01J1/304 H01J9/02 

FIELD: electrical engineering.

SUBSTANCE: invention relates to electronic engineering, in particular, to production of cathode-mesh assemblies with matrix field emission cathodes for electric vacuum devices, including microwave range. Method of making the cathode-mesh assembly includes forming, on the cathode substrate, a matrix of tip auto emitters, a control grid with holes for each auto emitter separated from the cathode by a dielectric film. Cassette substrate of carbon material is used to form a matrix of tip auto emitters which are a continuation of the cathode substrate. Boron nitride film of thickness H≤h is precipitated on a cathode substrate from boron nitride gas medium, where: h is height of tip auto emitters. Further, disks in the form of a photoresist cylinder are formed above the tips of the point auto emitter, and films made of chromium are sputtered on the surface free of disks from boron nitride, and then from aluminum with thickness of not more than 0.4 mcm, in which holes are formed by explosive etching of photoresist disks. Further, around the point auto emitters in the air of tetrafluoromethane, cavities are etched for the entire depth of the boron nitride film. Carbon material used to form auto emitters is isotropic pyrolytic graphite.

EFFECT: improving reliability and durability of low-voltage cathode-mesh assemblies consisting of multiple cells of micron sizes, containing tip field-emission emitters and control screen with holes separated from substrate by dielectric gap.

1 cl, 6 dwg