FIELD: physics.
SUBSTANCE: method of measuring linear sizes, using scanning electronic microscope as the distance between invariant points of distribution of intensity of re-radiation that forms the image on object edges, comprises registering re-radiation intensity profile with microscope focus depth exceeding object height and re-radiation intensity profiles with different sign of electron beam focusing at microscope focus depth smaller than object height. Note here that all profiles of re-radiation are registered in using electron beams with identical cut by the plane that corresponds to object zero height and intensity in said cut. To determine invariant points on object edges, magnitudes of intensity differential profiles are used.
EFFECT: higher accuracy of measurements.
11 cl, 14 dwg
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