FIELD: measurement technology. SUBSTANCE: linear dimensions of micron, submicron and nanometric objects are measured by means of scanning electron microscopes as distance between invariant points on video signal corresponding to object being measured. Position of every invariant point is determined as intersection point of curve corresponding to displayed video signal with rated curve. The latter is calculated as convolution or reversed convolution of video signal with arbitrary even integrated function. Method ensures more accurate determination of position of invariant points due to elimination of error of superposition of video signal approximating curves. EFFECT: enhanced accuracy. 3 cl, 1 dwg
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