FIELD: metallurgy.
SUBSTANCE: installation for production of mono-crystals by withdrawal downward consists of device for supply of powder-like raw stock 2, of shaft multi-zone vacuum furnace 4 of controlled atmosphere and of device for maintaining corresponding temperature gradient field 5 in it, of crucible 7 installed in furnace 4 for receiving melt raw material, of rotating and performing vertical reciprocal motions seed crystal 9 located on bar 10, of devise for evacuation of volatile impurities, and of zone 12 of annealing and cooling mono-crystal 1 in furnace 4 below crucible 7. According to the invention the installation additionally is equipped with container 13 contacting zone 12 for annealing and cooling mono-crystal 1 in furnace 4. The container is communicated with it by means of split double vacuum sluice 14 installed on an upper end of the container. A lower end of container 13 is made as removable cover 15. Also, container 13 is equipped with devices for maintaining corresponding gradient field 16 and composition of controlled atmosphere of the furnace. Split double vacuum sluice 14 facilitates both rotation and reciprocal vertical travels of bar 10 in it. Container 13 with grown mono-crystal 1 can be replaced with another interchangeable container with a seed crystal on a bar. Additionally, interchangeable containers are assembled in a mono-block of a rotary type with central vertical rotation axis. The mono-block alternately communicates containers with zone 12 for mono-crystal 1 annealing and cooling in furnace 4.
EFFECT: practically doubled efficiency of equipment.
2 cl, 2 dwg
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Authors
Dates
2011-05-10—Published
2009-11-09—Filed