PROCESS FURNACE OR SIMILAR EQUIPMENT Russian patent published in 2011 - IPC C23C16/00 F27B17/00 F27D7/00 

FIELD: chemistry.

SUBSTANCE: furnace has an outer cover, a reaction chamber inside the cover, a heating system and a system for circulating the reagent gas. The outer cover of the furnace and the reaction chamber bound a first volume between the inner side of the cover of the furnace and the outer side of the reaction chamber and a second volume inside the reaction chamber. The first volume is divided into a first part which forms the heating zone which accommodates the heating system and a second part in which the reagent gas is present. The heating zone is hermetically insulated from the second part. The furnace also has a system for circulating inert gas which is made and placed with possibility of feeding inert gas into the heating zone at a rate which provides positive differential pressure relative the pressure of the reagent gas inside the second part of the first volume in which the reagent gas is present in order to prevent passage of the reagent gas into the heating zone.

EFFECT: design prevents contact between the reagent gas and the heating system, which increases reliability and longevity of the device.

13 cl, 2 dwg