PRESSURE MEASURING TRANSDUCER Russian patent published in 2011 - IPC G01L9/12 

FIELD: physics.

SUBSTANCE: pressure measuring transducer has a detecting element in form of a flat circular membrane rigidly fastened along its perimeter and a capacitive displacement sensor formed by movable flat electrodes, placed inside a cover. The movable flat electrodes are mounted on posts perpendicular to the surface of the flat circular membrane at a distance of 0.5-0.6 of the radius of the membrane at diametrically opposite points, relative the centre of the flat circular membrane. The pressure measuring transducer also has a fixed flat electrode between the flat movable electrodes. The fixed flat electrode of the capacitive displacement sensor is attached through an insulating bushing at the centre of the bottom of the cover which covers the capacitive displacement sensor. The inside of the cover is filled dielectric liquid, and the plane of the movable flat electrodes of the capacitive displacement sensor are placed at an angle to the plane of the flat circular membrane and accordingly to the plane of the fixed flat electrode, placed at right angles to the plane of the flat circular membrane. The angle must not exceed the maximum inclination angle of the posts during deformation of the membrane, and each of the movable flat electrodes is rigidly attached by a holder to the corresponding post which is placed relative its movable flat electrodes in a diametrically opposite direction relative the centre of the circular flat membrane.

EFFECT: high measurement accuracy, avoiding mechanical oscillation of the movable flat electrodes of the capacitive displacement sensor, and low error of measuring slowly varying pressure.

2 dwg