FIELD: physics, measurement.
SUBSTANCE: inventions are related to measurement equipment and may be used for production of measuring capacitance microphones. Device contains tension mechanism, which consists of fixed holder, two metal plates, one of them is provided with support holes, and screws for fixation of membrane film, and also plates, one made of heat resistant rubber, the other made of duraluminium for pressing of capacitance sensitive element packet. Additionally it contains mobile holder with two screws, spring, fixator for spring tensioning, on which horizontal bracket is installed. Membrane is connected with fixed holder from one side and mobile holder - from the other side, and is fixed with screws. At that mobile holder is connected with the base by means of pin and horizontal bracket, fixator passes through horizontal bracket, and spring is put on fixator end that is fixed to the basis. Four grooves are cut out on the top surface of base, which contain support openings with atmosphere. In the process of method realisation capacitance sensitive elements (CSE) are produced on the basis of matrix technology on the same wafer as block of packet consisting of several tens of pieces, and by further single-piece formation. Membrane of CSE is tightened with special mechanism prior to pressing. Block of CSE packet is pressed between two plates. At that location of support holes, screens and back electrodes is marked on the film surface. Block of CSE packet in the stage of production is exposed to pressure of (3-3.5)-106 Pa/cm2. Dry glue on epoxide resin basis is used between layers of packet. Mode of packet block imidisation at 160-170°C is performed for 50-60 minutes.
EFFECT: increase of capacitance sensitive elements production efficiency, increase of measurement accuracy.
2 cl, 2 dwg
