FIELD: physics.
SUBSTANCE: proposed transducer incorporates at least one differential capacitor made up of two fixed electrodes and central moving electrode suspended there between to be displaced by external force to be measured. Method of operating capacitance transducer comprises applying equal opposite-direction excitation voltages between fixed electrodes and central electrode to measure central electrode displacement. Note here that charge part that may be tapped off central electrode and corresponds to electro static recovery force is called recovery noise.
EFFECT: notable in accuracy.
14 cl, 12 dwg
Title | Year | Author | Number |
---|---|---|---|
MICROMECHANICAL COMPONENT WITH A SEPARATE, GALVANIC ISOLATED ACTIVE STRUCTURE AND AN OPERATING METHOD OF SUCH A COMPONENT | 2015 |
|
RU2653112C2 |
MICRO ELECTROMECHANICAL TRANSDUCER AND METHOD OF ITS APPLICATION | 2007 |
|
RU2419768C2 |
ELECTROSTATIC SENSOR FOR CONTROLLING A MOVABLE THIN OBJECT | 2020 |
|
RU2723971C1 |
PRESSURE OVERFALL SENSING DEVICE | 0 |
|
SU1631330A1 |
POWER SUPPLY AND IMAGE SHAPING DEVICE INCORPORATING SUCH POWER SUPPLY | 2006 |
|
RU2317630C2 |
UNIVERSAL MODULE OF FREQUENCY INTEGRATION DEVELOPING TRANSDUCER FOR SENSORS OF PHYSICAL VALUE SENSORS | 2016 |
|
RU2631494C1 |
METHOD OF MEASURING AMPLITUDE-FREQUENCY CHARACTERISTICS OF MOVABLE ELEMENTS OF MICROMECHANICAL DEVICES | 2011 |
|
RU2488785C1 |
CAPACITIVE FREQUENCY-COMPENSATING ACCELEROMETER | 0 |
|
SU1663560A1 |
APPARATUS FOR HEATING SMOKABLE MATERIAL AND ARTICLE OF SMOKABLE MATERIAL | 2015 |
|
RU2656195C2 |
METHOD OF MEASURING ANGULAR VELOCITY AND MICROMETRIC GYROSCOPE | 2005 |
|
RU2289100C1 |
Authors
Dates
2011-10-10—Published
2008-03-14—Filed