MICROMECHANICAL COMPONENT WITH A SEPARATE, GALVANIC ISOLATED ACTIVE STRUCTURE AND AN OPERATING METHOD OF SUCH A COMPONENT Russian patent published in 2018 - IPC B81B3/00 

FIELD: mechanics.

SUBSTANCE: use: to create a micromechanical component. Summary of the invention consists in that the micromechanical component includes a substrate and an active structure, which is configured to deflect relative to the substrate in at least one direction and which has at least one first portion and a second portion, wherein the first portion and the second portion are electrically conductive, are physically rigidly connected to each other along a first axis (X) and electrically isolated from each other by an insulating portion, a first electrode, which extends outward from the first portion along a second axis (Y) in a first direction, and a second electrode that extends outward from the first portion along the second axis (Y) in a second direction, wherein the second axis (Y) being perpendicular to the first axis (X), and wherein the second direction is opposite to the first direction, and a third electrode that extends outward from the second portion along the second axis (Y) in the first direction, and a fourth electrode (232) that extends outward from the second portion along the second axis (Y) in the second direction.

EFFECT: technical result is ensuring the possibility of recording at zero frequency and increasing the accuracy.

26 cl, 7 dwg