FIELD: physics.
SUBSTANCE: transducer 30 comprises, at least, one movable electrode 29, electrode system 311-314 spaced a bit apart from electrode 29 and including electrodes to receive separately appropriate electrode signals (uo1 uo2, uu1 uu2) to be used to electrostatically set and/ or vary applied force, rigidity and gain factor in reading off movable electrode output signal. Electrode signal generation unit 32 connected with electrode signal 311-314 generates electrode signals (uo1 uo2, uu1 uu2) depending upon applied force signal f, rigidity signal (Δω) and gain factor signal (m) in reading off output signal, and matches electrode signals so that applied force, rigidity and gain factor in reading output signal may be set and/or varied to particular magnitude irrespective of each other.
EFFECT: expanded operating performances.
11 cl, 3 dwg
