FIELD: physics.
SUBSTANCE: electrochemical etching of a monocrystalline workpiece with a 0.5x0.5 mm cross-section is carried out in the meniscus region, the height of which falls with formation of necks between the upper and lower parts of the workpiece. The lower part of the workpiece is dipped into an electrolyte by 3 mm. Etching is carried out until the lower part of the workpiece tears off under its own weight. Sharpening is then carried out in an ultra-high vacuum, successively using coaxial electron or ion bombardment with argon ions, wherein sharp needles are directed opposite the direction of bombardment.
EFFECT: high stability and prolonged operation of the probe.
4 dwg
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Authors
Dates
2011-12-20—Published
2010-03-31—Filed