METHOD OF PRODUCING NEEDLES FROM MONOCRYSTALLINE TUNGSTEN FOR SCANNING TUNNEL MICROSCOPY Russian patent published in 2011 - IPC G01Q60/16 

Abstract RU 2437104 C1

FIELD: physics.

SUBSTANCE: electrochemical etching of a monocrystalline workpiece with a 0.5x0.5 mm cross-section is carried out in the meniscus region, the height of which falls with formation of necks between the upper and lower parts of the workpiece. The lower part of the workpiece is dipped into an electrolyte by 3 mm. Etching is carried out until the lower part of the workpiece tears off under its own weight. Sharpening is then carried out in an ultra-high vacuum, successively using coaxial electron or ion bombardment with argon ions, wherein sharp needles are directed opposite the direction of bombardment.

EFFECT: high stability and prolonged operation of the probe.

4 dwg

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RU 2 437 104 C1

Authors

Chajka Aleksandr Nikolaevich

Glebovskij Vadim Georgievich

Semenov Valerij Nikolaevich

Bozhko Sergej Ivanovich

Shtinov Evgenij Dmitrievich

Dates

2011-12-20Published

2010-03-31Filed