METHOD OF PROCESSING GAS FLOW Russian patent published in 2012 - IPC B01D53/68 B01D61/48 

FIELD: process engineering.

SUBSTANCE: in processing gas flow containing acid and solid particles, the following equipment is used: closed-circuit circulation system 20 including pump 22 for circulation of clean purifying solution in said closed circuit 20, electrochemical device 48 to reduce acidity of circulated solution, and outlet to discharge portion of circulated solution from close-circuit 20 into scrubber 10. Gas cleaning scrubber 10 has first bled solution inlet, second inlet to receive gas flow for dissolution in bled solution and outlet to discharge bled solution from scrubber. Closed circuit has outlet to receive solution flowing out of scrubber 20, device to monitor solution acidity 54 at point located within the limits of said closed circuit, and controller 52 to control solution acidity depending on measure concentration for adjustment of solubility of solid component of gas flow in bled solution.

EFFECT: possibility to efficiently clean perfluorinated gases, longer life of filters, control over circulated solution acidity.

27 cl, 2 dwg