OPTICAL DEVICE, METHOD OF MAKING MASTER COPY USED IN MAKING OPTICAL DEVICE, AND PHOTOELECTRIC CONVERTER Russian patent published in 2012 - IPC G02B1/11 G03F7/20 

FIELD: physics.

SUBSTANCE: optical device has a plurality of structures having elevated or depressed areas lying with short spacing equal to or shorter than the wavelength of visible light on the base surface. The structures form a plurality of rows in form of curved tracks on the base surface and form a quasi-hexagonal array configuration. The structure has the shape of an elliptic cone or a truncated elliptic cone, having a principle axis directed along the curved tracks. The method of making a master copy for use in making the optical device involves a first step for preparing a substrate with a resist coating on the surface; a second step for forming a latent image by periodic illumination of the resist coating to a laser beam while rotating the substrate and relative displacement of the laser beam in the radial direction with respect to rotation of the substrate; and a third step for forming a resist configuration on the surface of the substrate by developing the resist coating.

EFFECT: improved antireflection and packing density of the structures.

21 cl, 58 dwg